| Vacuum chamber type |
Separated structure |
| Body size |
Box front door, inner size is about
Φ550×620mm, SUS304 materials |
| Ultimate vacuum |
3.0×10-4Pa |
| Recovery vacuum |
Atmosphere→3×10-3Pa≤15min |
| Vacuum system configuration |
Molecular pump, direct connection pump, valve and pipeline |
| Vacuum system measurement |
Digital display automatic vacuum measuring instrument (resistance gauge + metal ionization gauge) |
| System operation (touch screen) |
Automatic PLC/ manual |
| The upper and lower substrates are designed for automatic positioning and the lower substrates are clamped automatically； |
| Evaporation source |
Resistance evaporation source and other components |
