Model: | OPT-1300P |
Workpiece holder mechanism | About 1200mm |
Rotating speed | 0-50rpm(variable) |
Crystal film thickness gauge | INFICON XTC/ 3+ 6 point crystal rotation sensor |
Operating system | Siemens/Mitsubishi |
Evaporation system | Electronic gun x2 |
lon source | Hall. Kaufman, RF |
Baking method | Room temperature -350C quartz lamp or stainless tube heater |
Ultimate vacuum | Below 7.0*10-5pa |
Pump-down time | Atmospheric pressure ~ 3.0*10-3Pa Below 15 min |
Power Requirement | Three-phase, 380v, 50/60Hz approx 110KVA |
Cooling water requirement | Above 140L/min |
Air pressure requirement | 0.5-0.7MPA |
Product feature
·The rotary mechanism adopts the center rotation mode, which is driven by magnetic fluid sealing technology, in roder to ensure the stability and uniformity of the coating.
·Configure an ion source to improve the wear resistance of the coating layer and increase its adhesion.
·Optical monitoring system and resistance heating evaporation source can be installed as required.
·The workpiece holder can be selected as a bell jar or planetary type.
·Wide range of coating materials.
·Easy to operate and maintain.
·High process stability.
Application field
·Automotive touch screen, mobile phone diaphragm color mobile phone cover glass, camera AR, telescope, optical lens,eyeglass lenses, high-end decorative parts.
Product application
·Metal film
·Optical filter.
·Reflective film .
·Antireflection film
·Anti-fingerprint film (NCVM)
·Configure ion source.
·Anti-reflective film